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Multi-channel Hall test system HSMC-10

Multi-channel Hall test system HSMC-10

The HSMC-10 multi-channel Hall test system provides a variable magnetic environment for multi-electrode cylindrical ingots, D-ingots and large wafers。Test temperature: room temperature or 77K liquid nitrogen low temperature, matrix switch to achieve free switching between test electrodes, selection, suitable for multi-electrode samples, 0.1T ~ 1T wide range of magnetic field adjustment interval, fast zero magnetic field control function。

Multi-channel Hall Test System HSMC-10 Product overview

The HSMC-10 multi-channel Hall test system provides a variable magnetic environment for multi-electrode cylindrical ingots, D-ingots and large wafers。The system has a 77K liquid nitrogen single point option to provide samples for Hall effect measurements at 77K low temperatures。Collocation hall tester,The electrical properties of materials with low mobility can be accurately measured in electromagnetic fields and liquid nitrogen at low temperatures (77K),Fast automated testing of many types of samples,To obtain the Hall parameter of the sample,It includes the resistivity, Hall voltage, Hall coefficient, carrier concentration, Hall mobility and carrier type of the sample to be measured,Fill in the gaps where traditional Hall test instruments can only measure samples after preparation。


System features:
• With industry advanced rapid Hall effect test function and data analysis function, greatly reducing the measurement time;
• Matrix switch realizes free switching and selection between test electrodes, which is suitable for multi-electrode samples;
• Customizable electromagnets can achieve a large magnetic field uniform area, suitable for large samples;
• With 24 electrode automatic selection, switching test and data analysis functions;
• 具有0.1T ~ 1T wide range of magnetic field adjustment interval, fast zero magnetic field control function;
• With automatic sampling function, it can support automatic sampling of samples weighing up to 1kg;
• With a wide range of sample test brackets to choose from, can measure cylindrical ingot, D ingot, wafer (2 inch, 4 inch and 6 inch) and other shapes and sizes of samples;
• With data collection, sorting, analysis, output functions, as well as report customization and export functions;
• With system scalability, it can support up to 32 electrode automatic switching test after upgrade。
• Test temperature: room temperature or 77K liquid nitrogen; 



Technical parameters of multi-channel Hall test system HSMC-10

Parameters and indicators:

Measurement parameter
Sample size to be measured 
Support 6 inches or larger, compatible with 4 inches and 2 inches
mobility
0.01~1×106cm2/Vs
Standard resistance measuring range
10mΩ ~ 10MΩ
Low temperature zone 77K
Hall test minimum R2
0.9999
Matrix switching parameter
Switch type
EMR
通道
Total (4Bank×16CH/Bank) channels: 4 groups, each group 1 cut 16
Switching time (Typ)
6ms
Switching load voltage
300VDC/250VAC
Switch carrying current
Switching current/continuous current: 1A, pulse current: 6A@100ms
Sample type
Cylindrical ingot
Cylindrical ingot is a cylinder or quasi-cylinder, and the ingot may have a plurality of electrodes
D-type ingot
The ingot can be divided in half along the axis of the cylindrical ingot, and there may be multiple electrodes on the ingot
wafer
2 ", 4 "and 6" samples
electromagnet
Magnetic field range
0.1T~1T@50A(Φ300mm pole surface, fixed air gap 75mm center)
Field step10Gs
Magnetic field uniformity

The 75mm air gap center magnetic field is better than 1.0T@50A(φ300mm pole) Working time: 30min

Uniform area Φ150*30mm, uniformity 1%

Uniform area Φ200*50mm, uniformity 5%

1%@ (30*Φ150mm), 5%@ (50*Φ200mm), weight: 2337KG

Electromagnet power supply
Output power
10 kW @ AC 380 V ±10%(50 ~60 Hz)
Output current
50 A
重量
30 kg
Two dimensional stepper motor
Horizontal X stroke
400mm
Vertical Z stroke (with brake)
700mm
77K liquid nitrogen single point system
Liquid nitrogen volume
约3.38L
Internal size of thermostat (mm)
190*54*33
Test temperature
Room temperature and 77K liquid nitrogen single point

Multi-channel Hall Test system HSMC-10 Application areas

semiconductor
Integrated circuit
wafer

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